Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region

Kowalski MP, Cruddace RG, Seely JF, Rife JC, Heidemann KF, Heinzmann U, Kleineberg U, Osterried K, Menke D, Hunter WR (1997)
OPTICS LETTERS 22(11): 834-836.

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The efficiency of an ion-etched laminar holographic grating was measured at near-normal incidence in the 14.5-16.0-nm wavelength range. The grating had an electron-beam-evaporated Mo/Si multilayer coating matched to the grating groove depth. The efficiency peaked at 16.3% in the first inside order at 15.12 nm and 15.0% in the first outside order at 14.94 nm. These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV (lambda < 30.0 nm). Zero and even orders were almost completely suppressed. The grating groove efficiency in the first order approached the theoretical limit of 40.5%. (C) 1997 Optical Society of America.
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Kowalski MP, Cruddace RG, Seely JF, et al. Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS. 1997;22(11):834-836.
Kowalski, M. P., Cruddace, R. G., Seely, J. F., Rife, J. C., Heidemann, K. F., Heinzmann, U., Kleineberg, U., et al. (1997). Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS, 22(11), 834-836.
Kowalski, M. P., Cruddace, R. G., Seely, J. F., Rife, J. C., Heidemann, K. F., Heinzmann, U., Kleineberg, U., Osterried, K., Menke, D., and Hunter, W. R. (1997). Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS 22, 834-836.
Kowalski, M.P., et al., 1997. Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS, 22(11), p 834-836.
M.P. Kowalski, et al., “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region”, OPTICS LETTERS, vol. 22, 1997, pp. 834-836.
Kowalski, M.P., Cruddace, R.G., Seely, J.F., Rife, J.C., Heidemann, K.F., Heinzmann, U., Kleineberg, U., Osterried, K., Menke, D., Hunter, W.R.: Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS. 22, 834-836 (1997).
Kowalski, MP, Cruddace, RG, Seely, JF, Rife, JC, Heidemann, KF, Heinzmann, Ulrich, Kleineberg, U, Osterried, K, Menke, D, and Hunter, WR. “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region”. OPTICS LETTERS 22.11 (1997): 834-836.
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