Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region

Kowalski MP, Cruddace RG, Seely JF, Rife JC, Heidemann KF, Heinzmann U, Kleineberg U, Osterried K, Menke D, Hunter WR (1997)
OPTICS LETTERS 22(11): 834-836.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
The efficiency of an ion-etched laminar holographic grating was measured at near-normal incidence in the 14.5-16.0-nm wavelength range. The grating had an electron-beam-evaporated Mo/Si multilayer coating matched to the grating groove depth. The efficiency peaked at 16.3% in the first inside order at 15.12 nm and 15.0% in the first outside order at 14.94 nm. These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV (lambda < 30.0 nm). Zero and even orders were almost completely suppressed. The grating groove efficiency in the first order approached the theoretical limit of 40.5%. (C) 1997 Optical Society of America.
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OPTICS LETTERS
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22
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834-836
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Kowalski MP, Cruddace RG, Seely JF, et al. Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS. 1997;22(11):834-836.
Kowalski, M. P., Cruddace, R. G., Seely, J. F., Rife, J. C., Heidemann, K. F., Heinzmann, U., Kleineberg, U., et al. (1997). Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS, 22(11), 834-836. doi:10.1364/OL.22.000834
Kowalski, M. P., Cruddace, R. G., Seely, J. F., Rife, J. C., Heidemann, K. F., Heinzmann, U., Kleineberg, U., Osterried, K., Menke, D., and Hunter, W. R. (1997). Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS 22, 834-836.
Kowalski, M.P., et al., 1997. Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS, 22(11), p 834-836.
M.P. Kowalski, et al., “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region”, OPTICS LETTERS, vol. 22, 1997, pp. 834-836.
Kowalski, M.P., Cruddace, R.G., Seely, J.F., Rife, J.C., Heidemann, K.F., Heinzmann, U., Kleineberg, U., Osterried, K., Menke, D., Hunter, W.R.: Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region. OPTICS LETTERS. 22, 834-836 (1997).
Kowalski, MP, Cruddace, RG, Seely, JF, Rife, JC, Heidemann, KF, Heinzmann, Ulrich, Kleineberg, U, Osterried, K, Menke, D, and Hunter, WR. “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5-16.0-nm wavelength region”. OPTICS LETTERS 22.11 (1997): 834-836.

12 Zitationen in Europe PMC

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