Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region

Seely JF, Kowalski MP, Cruddace RG, Heidemann KF, Heinzmann U, Kleineberg U, Osterried K, Menke D, Rife JC, Hunter WR (1997)
APPLIED OPTICS 36(31): 8206-8213.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
We characterized a laminar grating with a Mo/Si multilayer coating by using synchrotron radiation and atomic force microscopy. The grating substrate had 2400 grooves/mm, 40-Angstrom groove depth, and 2080-Angstrom groove width. The microroughness of the grating substrate was 5 Angstrom rms. The multilayer coating was optimized to have peak normal-incidence reflectance at a wavelength near 150 Angstrom. For an angle of incidence of 10 degrees the peak grating efficiency was 16.3% in the +1 order and 15.0% in the -1 order. The efficiency in the zero order was lower by a factor of 40 owing to the excellent matching of the groove depth and groove width to the wavelength of the incident radiation. By dividing the grating efficiencies by the measured reflectance of the multilayer coating, we obtained inferred groove efficiencies of 34% and 32% in the +1 and -1 orders, respectively. (C) 1991 Optical Society of America.
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APPLIED OPTICS
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36
Zeitschriftennummer
31
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8206-8213
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Seely JF, Kowalski MP, Cruddace RG, et al. Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region. APPLIED OPTICS. 1997;36(31):8206-8213.
Seely, J. F., Kowalski, M. P., Cruddace, R. G., Heidemann, K. F., Heinzmann, U., Kleineberg, U., Osterried, K., et al. (1997). Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region. APPLIED OPTICS, 36(31), 8206-8213. doi:10.1364/AO.36.008206
Seely, J. F., Kowalski, M. P., Cruddace, R. G., Heidemann, K. F., Heinzmann, U., Kleineberg, U., Osterried, K., Menke, D., Rife, J. C., and Hunter, W. R. (1997). Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region. APPLIED OPTICS 36, 8206-8213.
Seely, J.F., et al., 1997. Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region. APPLIED OPTICS, 36(31), p 8206-8213.
J.F. Seely, et al., “Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region”, APPLIED OPTICS, vol. 36, 1997, pp. 8206-8213.
Seely, J.F., Kowalski, M.P., Cruddace, R.G., Heidemann, K.F., Heinzmann, U., Kleineberg, U., Osterried, K., Menke, D., Rife, J.C., Hunter, W.R.: Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region. APPLIED OPTICS. 36, 8206-8213 (1997).
Seely, JF, Kowalski, MP, Cruddace, RG, Heidemann, KF, Heinzmann, Ulrich, Kleineberg, U, Osterried, K, Menke, D, Rife, JC, and Hunter, WR. “Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-angstrom wavelength region”. APPLIED OPTICS 36.31 (1997): 8206-8213.

14 Zitationen in Europe PMC

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