Carbon/titanium multilayers as soft-x-ray mirrors for the water window

Stock HJ, Haindl G, Hamelmann F, Menke D, Wehmeyer O, Kleineberg U, Heinzmann U, Bulicke P, Fuchs D, Ulm G (1998)
APPLIED OPTICS 37(25): 6002-6005.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
C/Ti multilayers with a period thickness of 2.1-2.7 nm were produced by electron-beam evaporation in ultrahigh vacuum as soft-x-ray mirrors in the water window (lambda = 2.3-4.4 nm). For smoothing the individual interfaces and thus enhancing the total reflectance, each layer was ion polished with an Art ion beam after deposition. For a multilayer of 85 bilayers, a reflectance of approximately 11% at an angle of incidence of 59 degrees (with respect to the surface normal) by use of s-polarized radiation at a wavelength of 2.77 nm was achieved. (C) 1998 Optical Society of America.
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Zeitschriftentitel
APPLIED OPTICS
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37
Zeitschriftennummer
25
Seite
6002-6005
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Stock HJ, Haindl G, Hamelmann F, et al. Carbon/titanium multilayers as soft-x-ray mirrors for the water window. APPLIED OPTICS. 1998;37(25):6002-6005.
Stock, H. J., Haindl, G., Hamelmann, F., Menke, D., Wehmeyer, O., Kleineberg, U., Heinzmann, U., et al. (1998). Carbon/titanium multilayers as soft-x-ray mirrors for the water window. APPLIED OPTICS, 37(25), 6002-6005. doi:10.1364/AO.37.006002
Stock, H. J., Haindl, G., Hamelmann, F., Menke, D., Wehmeyer, O., Kleineberg, U., Heinzmann, U., Bulicke, P., Fuchs, D., and Ulm, G. (1998). Carbon/titanium multilayers as soft-x-ray mirrors for the water window. APPLIED OPTICS 37, 6002-6005.
Stock, H.J., et al., 1998. Carbon/titanium multilayers as soft-x-ray mirrors for the water window. APPLIED OPTICS, 37(25), p 6002-6005.
H.J. Stock, et al., “Carbon/titanium multilayers as soft-x-ray mirrors for the water window”, APPLIED OPTICS, vol. 37, 1998, pp. 6002-6005.
Stock, H.J., Haindl, G., Hamelmann, F., Menke, D., Wehmeyer, O., Kleineberg, U., Heinzmann, U., Bulicke, P., Fuchs, D., Ulm, G.: Carbon/titanium multilayers as soft-x-ray mirrors for the water window. APPLIED OPTICS. 37, 6002-6005 (1998).
Stock, HJ, Haindl, G, Hamelmann, Frank, Menke, D, Wehmeyer, O, Kleineberg, U, Heinzmann, Ulrich, Bulicke, P, Fuchs, D, and Ulm, G. “Carbon/titanium multilayers as soft-x-ray mirrors for the water window”. APPLIED OPTICS 37.25 (1998): 6002-6005.

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