Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere

Bruckl H, Kretz J, Koops HW, Reiss G (1999)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 17(4): 1350-1353.

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Abstract
Electron beam induced decomposition of metalorganic precursor substances with a scanning tunneling microscope is a convenient way to create nanometer-sized structures. Up to now, the application was limited due to the necessity of vacuum conditions. In this contribution, we report experiments to form metallic nanostructures by the decomposition of dimethylgold(III)-trifluoro-acetylacetonate and cyclopentadienylplatin(IV)-trimethyl on graphite and indium-tin-oxide coated glass substrates at ambient atmosphere. Small hillocks with diameters down to 30 nm and heights of 10 nm and wire-shaped structures were produced. The amount of the deposited material depends on the energy and the dose of the electrons. A threshold voltage was found for both materials. (C) 1999 American Vacuum Society. [S0734-211X(99)07804-X].
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Bruckl H, Kretz J, Koops HW, Reiss G. Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 1999;17(4):1350-1353.
Bruckl, H., Kretz, J., Koops, H. W., & Reiss, G. (1999). Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 17(4), 1350-1353.
Bruckl, H., Kretz, J., Koops, H. W., and Reiss, G. (1999). Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 17, 1350-1353.
Bruckl, H., et al., 1999. Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 17(4), p 1350-1353.
H. Bruckl, et al., “Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere”, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 17, 1999, pp. 1350-1353.
Bruckl, H., Kretz, J., Koops, H.W., Reiss, G.: Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 17, 1350-1353 (1999).
Bruckl, H, Kretz, J, Koops, HW, and Reiss, Günter. “Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere”. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 17.4 (1999): 1350-1353.
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