Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies

Atakan B, Kohse-Höinghaus K (2001)
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY 11(3): 159-171.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
With the aim of providing a more detailed understanding of the reaction mechanism in the combustion chemical vapor deposition (CVD) of diamond, two flame CVD systems were investigated. In an acetylene-oxygen flame at ambient pressure, the influences of important deposition parameters including stoichiometry, substrate temperature and pretreatment as well as the effect of gas phase additives were studied systematically, and conditions for controlled diamond growth were defined. From a large number of deposition experiments, film and growth properties such as growth rate, morphology, stress and purity were thus linked to the global gas phase composition. In a low-pressure CVD flame, gas phase constituents including important intermediates were analyzed in situ under selected deposition conditions to provide further insight into the reaction mechanism. For this, a combination of molecular beam sampling mass spectrometry (MBMS) and laser spectroscopy was employed. The species profiles obtained from these experiments were compared with simulation results of the flame chemistry.
Erscheinungsjahr
Zeitschriftentitel
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY
Band
11
Zeitschriftennummer
3
Seite
159-171
ISSN
PUB-ID

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Atakan B, Kohse-Höinghaus K. Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies. NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY. 2001;11(3):159-171.
Atakan, B., & Kohse-Höinghaus, K. (2001). Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies. NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 11(3), 159-171.
Atakan, B., and Kohse-Höinghaus, K. (2001). Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies. NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY 11, 159-171.
Atakan, B., & Kohse-Höinghaus, K., 2001. Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies. NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 11(3), p 159-171.
B. Atakan and K. Kohse-Höinghaus, “Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies”, NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, vol. 11, 2001, pp. 159-171.
Atakan, B., Kohse-Höinghaus, K.: Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies. NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY. 11, 159-171 (2001).
Atakan, Burak, and Kohse-Höinghaus, Katharina. “Combustion CVD of diamond: Gas phase diagnostics and mechanistic studies”. NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY 11.3 (2001): 159-171.