CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2)

Fischer Rivera E, Atakan B, Kohse-Höinghaus K (2001)
JOURNAL DE PHYSIQUE IV 11: Pr3-629-Pr3-635.

Journal Article | Published | English

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Abstract
Cobalt oxides are interesting materials for catalytic applications. Their deposition by CVD methods, however, have been rarely studied to date. In this work, cobalt(Il)-acetylacetonate, Co(acac)(2), Was used as metalorganic precursor together with oxygen, to deposit Co3O4 on steel and silicon dioxide substrates in an atmospheric cold-wall CVD reactor. The morphology and growth rate as a function of temperature, flow rate and oxygen partial pressure was studied. Growth was found between 200 and 500 degreesC. The samples were analysed by SEM, UV-Vis spectroscopy and XRD. The morphology as well as the growth rate may be varied in a wide parameter range from smooth films to dendritic growth. Some samples were also tested for their catalytic activity in propane oxidation.
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Fischer Rivera E, Atakan B, Kohse-Höinghaus K. CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2). JOURNAL DE PHYSIQUE IV. 2001;11:Pr3-629-Pr3-635.
Fischer Rivera, E., Atakan, B., & Kohse-Höinghaus, K. (2001). CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2). JOURNAL DE PHYSIQUE IV, 11, Pr3-629-Pr3-635.
Fischer Rivera, E., Atakan, B., and Kohse-Höinghaus, K. (2001). CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2). JOURNAL DE PHYSIQUE IV 11, Pr3-629-Pr3-635.
Fischer Rivera, E., Atakan, B., & Kohse-Höinghaus, K., 2001. CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2). JOURNAL DE PHYSIQUE IV, 11, p Pr3-629-Pr3-635.
E. Fischer Rivera, B. Atakan, and K. Kohse-Höinghaus, “CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2)”, JOURNAL DE PHYSIQUE IV, vol. 11, 2001, pp. Pr3-629-Pr3-635.
Fischer Rivera, E., Atakan, B., Kohse-Höinghaus, K.: CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2). JOURNAL DE PHYSIQUE IV. 11, Pr3-629-Pr3-635 (2001).
Fischer Rivera, Edgar, Atakan, Burak, and Kohse-Höinghaus, Katharina. “CVD deposition of cobalt oxide (Co3O4) from Co(acac)(2)”. JOURNAL DE PHYSIQUE IV 11 (2001): Pr3-629-Pr3-635.
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