CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions

Haase T, Kohse-Höinghaus K, Bahlawane N, Djiele P, Jakob A, Lang H (2005)
CHEMICAL VAPOR DEPOSITION 11(4): 195-205.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
Tri-(n)butylphosphine silver(I) complexes were synthesized and characterized with respect to their suitability for the CVD of silver thin films. The volatility and thermal stability of these complexes were investigated using temperature-programmed and in-situ mass spectrometry (MS). Complexes with smaller carboxylate ligands showed superior long-term stability and had the advantage of evaporation without decomposition. Careful examination of the fragments detected during evaporation and in a CVD reactor allowed us to propose the gas-phase decomposition mechanisms of some potentially suitable silver precursors. Deposition experiments in a cold-wall CVD reactor using selected precursors resulted in smooth and conductive silver coatings.
Erscheinungsjahr
Zeitschriftentitel
CHEMICAL VAPOR DEPOSITION
Band
11
Zeitschriftennummer
4
Seite
195-205
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Haase T, Kohse-Höinghaus K, Bahlawane N, Djiele P, Jakob A, Lang H. CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions. CHEMICAL VAPOR DEPOSITION. 2005;11(4):195-205.
Haase, T., Kohse-Höinghaus, K., Bahlawane, N., Djiele, P., Jakob, A., & Lang, H. (2005). CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions. CHEMICAL VAPOR DEPOSITION, 11(4), 195-205. doi:10.1002/cvde.200406339
Haase, T., Kohse-Höinghaus, K., Bahlawane, N., Djiele, P., Jakob, A., and Lang, H. (2005). CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions. CHEMICAL VAPOR DEPOSITION 11, 195-205.
Haase, T., et al., 2005. CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions. CHEMICAL VAPOR DEPOSITION, 11(4), p 195-205.
T. Haase, et al., “CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions”, CHEMICAL VAPOR DEPOSITION, vol. 11, 2005, pp. 195-205.
Haase, T., Kohse-Höinghaus, K., Bahlawane, N., Djiele, P., Jakob, A., Lang, H.: CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions. CHEMICAL VAPOR DEPOSITION. 11, 195-205 (2005).
Haase, Thomas, Kohse-Höinghaus, Katharina, Bahlawane, Naoufal, Djiele, Patrice, Jakob, A., and Lang, Heinrich. “CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions”. CHEMICAL VAPOR DEPOSITION 11.4 (2005): 195-205.