Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode

Kanak J, Stobiecki T, Schebaum O, Reiss G, Bruckl H (2006)
PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS 243(1): 197-201.

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Abstract
In this study, we report the relationship between interface roughness, texture and the exchange bias and the interlayer-Neel coupling fields of the spin-valve magnetic tunnel junction (SV-MTJ). SV-MTJs with the structure: Si(100)/SiO2/buffer/IrMn/CoFeB/AlOx/NiFe/Ta were deposited on two buffers: Cu and Ta/Cu/Ta/Cu, and next the samples were annealed in vacuum and in a magnetic field. XRD analysis reveals that the texture degree of MTJ with Cu buffer is significantly lower than that of the sample with Ta/Cu/Ta/Cu buffer. The enhancement of IrMn and CoFeB texture leads to a higher amplitude of roughness and an increase of exchange bias and Neel coupling fields. The comparison of junctions with CoFe and CoFeB bottom electrodes shows that addition of 5% B in a CoFe layer makes the surface of the pinned layer smoother. This leads to a lower Neel coupling field, which is desirable for application of MTJ in MRAM technology. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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Kanak J, Stobiecki T, Schebaum O, Reiss G, Bruckl H. Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS. 2006;243(1):197-201.
Kanak, J., Stobiecki, T., Schebaum, O., Reiss, G., & Bruckl, H. (2006). Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS, 243(1), 197-201. doi:10.1002/pssb.200562456
Kanak, J., Stobiecki, T., Schebaum, O., Reiss, G., and Bruckl, H. (2006). Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS 243, 197-201.
Kanak, J., et al., 2006. Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS, 243(1), p 197-201.
J. Kanak, et al., “Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode”, PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS, vol. 243, 2006, pp. 197-201.
Kanak, J., Stobiecki, T., Schebaum, O., Reiss, G., Bruckl, H.: Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS. 243, 197-201 (2006).
Kanak, J, Stobiecki, T, Schebaum, O, Reiss, Günter, and Bruckl, H. “Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode”. PHYSICA STATUS SOLIDI. B, BASIC SOLID STATE PHYSICS 243.1 (2006): 197-201.
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