Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode

Kanak J, Stobiecki T, Schebaum O, Reiss G, Bruckl H (2006)
In: PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS. 243. WILEY-V C H VERLAG GMBH: 197-201.

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Abstract
In this study, we report the relationship between interface roughness, texture and the exchange bias and the interlayer-Neel coupling fields of the spin-valve magnetic tunnel junction (SV-MTJ). SV-MTJs with the structure: Si(100)/SiO2/buffer/IrMn/CoFeB/AlOx/NiFe/Ta were deposited on two buffers: Cu and Ta/Cu/Ta/Cu, and next the samples were annealed in vacuum and in a magnetic field. XRD analysis reveals that the texture degree of MTJ with Cu buffer is significantly lower than that of the sample with Ta/Cu/Ta/Cu buffer. The enhancement of IrMn and CoFeB texture leads to a higher amplitude of roughness and an increase of exchange bias and Neel coupling fields. The comparison of junctions with CoFe and CoFeB bottom electrodes shows that addition of 5% B in a CoFe layer makes the surface of the pinned layer smoother. This leads to a lower Neel coupling field, which is desirable for application of MTJ in MRAM technology. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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Kanak J, Stobiecki T, Schebaum O, Reiss G, Bruckl H. Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. In: PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS. Vol 243. WILEY-V C H VERLAG GMBH; 2006: 197-201.
Kanak, J., Stobiecki, T., Schebaum, O., Reiss, G., & Bruckl, H. (2006). Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 243(1), 197-201.
Kanak, J., Stobiecki, T., Schebaum, O., Reiss, G., and Bruckl, H. (2006). “Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode” in PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, vol. 243, (WILEY-V C H VERLAG GMBH), 197-201.
Kanak, J., et al., 2006. Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. In PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS. no.243 WILEY-V C H VERLAG GMBH, pp. 197-201.
J. Kanak, et al., “Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode”, PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, vol. 243, WILEY-V C H VERLAG GMBH, 2006, pp.197-201.
Kanak, J., Stobiecki, T., Schebaum, O., Reiss, G., Bruckl, H.: Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS. 243, p. 197-201. WILEY-V C H VERLAG GMBH (2006).
Kanak, J, Stobiecki, T, Schebaum, O, Reiss, Günter, and Bruckl, H. “Microstructure and exchange coupling parameters of MTJ with CoFeB bottom electrode”. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS. WILEY-V C H VERLAG GMBH, 2006.Vol. 243. 197-201.
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