30 Publikationen

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  • [30]
    2013 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2343895
    Prunici, P., et al., 2013. Modelling of infrared optical constants for polycrystalline low pressure chemical vapour deposition ZnO:B films. Journal of Applied Physics, 113(21): 123104.
    PUB | DOI | WoS
     
  • [29]
    2009 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 2345328 OA
    Lükermann, F., et al., 2009. Surface modification of LPCVD ZNO-Films for silicon thin film solar cells. In Proceedings of the 24th EU PVSEC. pp. 2299-2303.
    PUB | PDF | DOI
     
  • [28]
    2009 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1589799
    Ivanova, T., et al., 2009. Electrochromic mixed films based On WO3 and MoO3, obtained by an APCVD method. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 11(10), p 1513-1516.
    PUB | WoS
     
  • [27]
    2006 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1874432
    Wonisch, A., et al., 2006. Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. In R. Kassing, et al., eds. Functional Properties of Nanostructured Materials. Dordrecht: Springer, pp. 351-354.
    PUB | DOI
     
  • [26]
    2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1601030
    Szekeres, A., et al., 2006. Plasma-assisted chemical vapor deposited silicon oxynitride as an alternative material for gate dielectric in MOS devices. MICROELECTRONICS JOURNAL, 37(1), p 64-70.
    PUB | DOI | WoS
     
  • [25]
    2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1874437
    Gesheva, K., et al., 2005. Technology and characterization of CVD-grown mixed Mo/W oxide films and electrochromic devices made on their basis. In ECS Proceedings PV 2005-09. pp. 799-799.
    PUB
     
  • [24]
    2005 | Sammelwerksbeitrag | PUB-ID: 1874434
    Ivanova, T., et al., 2005. Plasma enhanced MOCVD of transition metal oxide thin films with a thickness between some hundred and less than one nanometer for optical applications. In ECS Proceedings; PV 2005-09. pp. 433-433.
    PUB
     
  • [23]
    2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604367
    Szekeres, A., et al., 2005. Electrical properties of plasma-assisted CVD deposited thin silicon oxynitride films. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 7(1), p 553-556.
    PUB | WoS
     
  • [22]
    2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604354
    Hamelmann, F., et al., 2005. Deposition of silicon oxide thin films in TEOS with addition of oxygen to the plasma ambient: IR spectra analysis. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 7(1), p 389-392.
    PUB | WoS
     
  • [21]
    2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604360
    Hamelmann, F., et al., 2005. Optical and electrochromic characterization of multilayered mixed metal oxide thin films. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 7(1), p 393-396.
    PUB | WoS
     
  • [20]
    2004 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1873183
    Aschentrup, A., et al., 2004. Plasma assisted deposition of thin carbon films from methane and the influence of the plasma parameters and additional gases. Vacuum 76, 76(2-3), p 139-142.
    PUB | DOI | WoS
     
  • [19]
    2004 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1609091
    Hamelmann, F., et al., 2004. Light-stimulated switching of azobenzene-containing self-assembled monolayers. APPLIED SURFACE SCIENCE, 222(1-4), p 1-5.
    PUB | DOI | WoS
     
  • [18]
    2004 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1609015
    Hamelmann, F., et al., 2004. Thin molybdenum oxide films produced by molybdenum pentacarbonyl 1-methylbutylisonitrile with plasma-assisted chemical vapor deposition. THIN SOLID FILMS, 446(2), p 167-171.
    PUB | DOI | WoS
     
  • [17]
    2004 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1606874
    Hamelmann, F., et al., 2004. Plasma-assisted deposition of thin silicon oxide films in a remote PECVD reactor and characterization of films produced under different conditions. Vacuum, 75(4), p 307-312.
    PUB | DOI | WoS
     
  • [16]
    2003 | Sammelwerksbeitrag | PUB-ID: 1882887
    Hamelmann, F., et al., 2003. Thin Tungsten and Tungsten Oxide Films Produced by Tungsten Pentacarbonoyle Pentylisonitrile in a Remote Plasma Reactor. In M. Allendorf, F. Maury, & F. Teyssandier, eds. Chemical Vapor Deposition CVD XVI ECS Proceedings.
    PUB
     
  • [15]
    2001 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1616209
    Hamelmann, F., et al., 2001. Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD. JOURNAL DE PHYSIQUE IV, 11(PR3), p 431-436.
    PUB | WoS
     
  • [14]
    2000 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1883586
    Klipp, A., et al., 2000. The synthesis of Cyclopentadienyl silanes and disilanes and their fragmentation under thermal CVD conditions. In N. Auer & J. Weis, eds. Organosilicon Chemistry from Molecules to Materials IV, eds. N.Auner,J.Weis. VCH Weinheim: VCH, pp. 806-806.
    PUB
     
  • [13]
    2000 | Dissertation | PUB-ID: 2433882
    Hamelmann, F., 2000. Herstellung von Metall-Silizium-Multischichten mit dem MOCVD-Verfahren, Berichte aus der Physik, Aachen: Shaker.
    PUB
     
  • [12]
    2000 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1958189
    Hamelmann, F., et al., 2000. Plasma enhanced MOCVD of smooth nanometer-sized Metal/Silicon Single- and multilayer films. In M. D. Allendorf & T. M. Besman, eds. Chemical Vapor Deposition CVD XV, ECS Proc. PV. pp. 131.
    PUB
     
  • [11]
    2000 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1620849
    Hamelmann, F., et al., 2000. Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD. THIN SOLID FILMS, 358(1-2), p 90-93.
    PUB | DOI | WoS
     
  • [10]
    2000 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1620153
    Klipp, A., et al., 2000. Pentamethylcyclopentadienyl disilane as a novel precursor for the CVD of thin silicon films. CHEMICAL VAPOR DEPOSITION, 6(2), p 63-66.
    PUB | DOI | WoS
     
  • [9]
    2000 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1883600
    Hamelmann, F., et al., 2000. In situ controlled deposition of thin silicon films by hot filament MOCVD with (C5Me5) Si2H5 and (C5Me4H)SiH3 as silicon precursors. In N. Auer & J. Weis, eds. Organosilicon Chemistry IV: from Molecules to Materials. Weinheim: Wiley-VCH, pp. 798-798.
    PUB
     
  • [8]
    1999 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1622128
    Luby, S., et al., 1999. Thermal behaviour of Co/Si/W/Si multilayers under rapid thermal annealing. APPLIED SURFACE SCIENCE, 150(1-4), p 178-184.
    PUB | DOI | WoS
     
  • [7]
    1999 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1622647
    Kleineberg, U., et al., 1999. Photoemission microscopy with microspot-XPS by use of undulator radiation and a high-throughput multilayer monochromator at BESSY. In Journal of Electron Spectroscopy and Related Phenomena. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. no.103 ELSEVIER SCIENCE BV, pp. 931-936.
    PUB | DOI | WoS
     
  • [6]
    1999 | Zeitschriftenaufsatz | PUB-ID: 1883592
    Hamelmann, F., et al., 1999. Metal/Silicon multilayers produced by low temperature MOCVD. Mater.Res.Soc.Proc., 555, p 19-19.
    PUB
     
  • [5]
    1999 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1623447
    Hamelmann, F., et al., 1999. W/Si multilayers deposited by hot-filament MOCVD. THIN SOLID FILMS, 338(1-2), p 70-74.
    PUB | DOI | WoS
     
  • [4]
    1998 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1624974
    Stock, H.J., et al., 1998. Carbon/titanium multilayers as soft-x-ray mirrors for the water window. APPLIED OPTICS, 37(25), p 6002-6005.
    PUB | DOI | WoS | PubMed | Europe PMC
     
  • [3]
    1997 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1637888
    Senderak, R., et al., 1997. Thermal stability of W1-xSix/Si multilayers under rapid thermal annealing. JOURNAL OF APPLIED PHYSICS, 81(5), p 2229-2235.
    PUB | DOI | WoS
     
  • [2]
    1997 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1637796
    Stock, H.J., et al., 1997. Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS, 36(7), p 1650-1654.
    PUB | DOI | WoS | PubMed | Europe PMC
     
  • [1]
    1996 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1638117
    D'Anna, E., et al., 1996. Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. In Applied Surface Science. Applied Surface Science. no.106 Elsevier, pp. 166-170.
    PUB | DOI | WoS
     

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