3 Publikationen
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2020 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2948626Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collectionPUB | DOI | WoS
Böwering, Norbert, Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection. Journal of Vacuum Science & Technology B 38 (6). , 2020 -
2019 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2937335Sticking behavior and transformation of tin droplets on silicon wafers and multilayer-coated mirrorsPUB | DOI | WoS
Böwering, Norbert, Sticking behavior and transformation of tin droplets on silicon wafers and multilayer-coated mirrors. Applied Physics A 125 (9). , 2019 -
2018 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2919314In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet lightPUB | DOI | WoS
Boewering, Norbert, In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 36 (2). , 2018