PUB - Publikationen an der Universität Bielefeld

Christian Meier

PEVZ-ID

[3]

2020 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2948626
Böwering, Norbert, and Meier, Christian. “Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection”. Journal of Vacuum Science & Technology B 38.6 (2020): 062602.
PUB | DOI | WoS
[2]

2019 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2937335
Böwering, Norbert, and Meier, Christian. “Sticking behavior and transformation of tin droplets on silicon wafers and multilayer-coated mirrors”. Applied Physics A 125.9 (2019): 633.
PUB | DOI | WoS
[1]

2018 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2919314
Boewering, Norbert, and Meier, Christian. “In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light”. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 36.2 (2018): 10.
PUB | DOI | WoS