2020 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 2948626
Böwering, N., & Meier, C. (2020). Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection. Journal of Vacuum Science & Technology B, 38(6), 062602. doi:10.1116/6.0000501
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